Advanced semiconductor storage and handling solution with ultra-precision control, intelligent management, and seamless fab integration. Trusted by leading semiconductor manufacturers worldwide.
Positioning Accuracy
Wafer Capacity
Cycle Time
Cleanroom Ready
Industry-leading technology designed for maximum efficiency and reliability in semiconductor manufacturing
Achieve positioning accuracy up to ±0.1mm for wafer handling and 0.3-0.5mm for FOUP storage, ensuring safe material placement.
Collaborative dual manipulator system enables simultaneous operations, improving throughput by up to 40%.
Integrated FFU systems with Class 10/100/1000 certification meet the strictest semiconductor standards.
AI-powered tracking with "One Item, One Code, One Location" system for complete material traceability.
Anti-static materials with 10⁶-10¹¹Ω surface resistance protect sensitive semiconductor materials.
SECS/GEM protocol support with AMR/OHT compatibility for smooth fab automation integration.
Comprehensive specifications for BOX SEMI product variants
| Dimensions | L4465 × W2200 × H2500mm (customizable) |
|---|---|
| Storage Capacity | Up to 1,800 wafers (6-inch configuration) |
| Wafer Sizes | 4″ / 6″ / 8″ / 12″ compatible |
| Positioning Accuracy | ±0.1mm |
| Cycle Time | 6-12 seconds per wafer |
| Arm Load Capacity | 1kg |
| Operating Temperature | 20-25°C |
| Humidity Control | 10-45% RH |
| Dimensions | L5100 × W2400 × H2700mm (customizable) |
|---|---|
| Storage Capacity | Up to 320 carriers |
| Container Types | FOUP, FOSB, SMIF Pod, Cassette, Mask Box |
| Positioning Accuracy | 0.3-0.5mm |
| Cycle Time | 20-30 seconds per carrier |
| Arm Load Capacity | 12-25kg (customizable) |
| Communication Protocol | SECS/GEM (E82/E88) |
| Power Backup | 30 minutes UPS |
| Cleanroom Class | Class 10 / 100 / 1000 |
|---|---|
| Vibration Level | ≤0.5G |
| Noise Level | ≤75dB |
| ESD Protection | Surface resistance 10⁶-10¹¹Ω |
| Interface Options | AMR / OHT / EFEM compatible |
| Management System | AI-powered with real-time monitoring |
| Tracking System | One Item, One Code, One Location |
| Software Features | Dashboard, Analytics, Predictive Maintenance |
Versatile solutions for various semiconductor manufacturing environments
Wafer Fab Storage
Front-End Manufacturing
IC Assembly & Test
Mask Management
Cross-Fab Transport
Buffer Storage
Cleanroom Logistics
Quality Control
Join industry leaders who trust BOX SEMI for their critical material handling needs
